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MEMSnet Home: MEMS-Talk: Re: processing information wanted
Re: processing information wanted
1996-05-29
Mike Gibbs
1996-06-09
Gang Lin
1996-06-10
Pierre Jaccard
1996-06-15
[email protected]
Re: processing information wanted
Gang Lin
1996-06-09
> 1. We want to deposit a patterned metal film onto polyimide. Any
> suggestion regarding suitable metals that give at lweast some modest
> adhesion?
Here is what I did:
deposit about 50 angstrom Cr as adhesion layer, and then use evaporator /
sputter to put 0.1 micron Au / Pt on the polyimide. I got pretty decent
adhesion.

Gang Lin
Louisiana Tech University


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