Dear all,

I am doing experiments of RIE of Au (2000 ang.) with
AZ1512 as etch mask. But I find that during Au etching
using Cl2 gas, gold redeposits on my samples and its
suroundings. In some condition, it makes the samples
impaired. Could you please share some experience with
me? I want to know how to eliminate this problem and
speed up the etching process (preffered anisotropic
etching). Can I use other gas mixture to etch gold ?
Our RIE machine has etching gases as Cl2, O2, CF4, He,
SF6.

Thanks in advance,
Regards,

Chi Anh

KIST,
Seoul, Korea
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