A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: Silicon Fusion Bond Strength
Re: Silicon Fusion Bond Strength
1996-06-06
David Wood
1996-06-07
Jarlath McEntee
1996-06-10
[email protected]
1996-06-11
[email protected]
1996-06-11
David Wood
1996-06-11
Jarlath McEntee
Re: Silicon Fusion Bond Strength
[email protected]
1996-06-11
That may very well be the case, but nonethe less a feqw years ago I was
impressed with the strength of an anodic bond formed between glass and silicon.
The glass was a cover glass and the bond was formed with a few 100 V and low T
(~200C). A "nail" epoxy bonded to the glass pulled a chunk of silicon from
itseldf at the "failure point".


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
University Wafer
Tanner EDA by Mentor Graphics
MEMStaff Inc.