Dear Jaideep,

You can try the software TRIM that simulates the penetration of ions of
different energies on different materials by MonteCarlo simulations.

I think you can find it on the Web....

Good luck!

Sonia.

*****************************************************

Sonia Garcia-Blanco

Department of Electronics and Electrical Engineering
University of Glasgow
Oakfield Ave.
G12 8LT
Glasgow

Phone:
   Office: (0141) 339 8855 ext 0101
   Lab:    (0141) 330 6014
Email: [email protected]

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On Mon, 5 Nov 2001, jaideep mavoori wrote:

> Hello.
> Is there a table/software for calculating ion implant depth vs energy for
> various tilt angles for various species and substrates (Si primarily).
>
> Thanks.
> Jaideep
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