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MEMSnet Home: MEMS-Talk: silicon nitride thin films
silicon nitride thin films
2001-11-08
ses
silicon nitride thin films
ses
2001-11-08
I would like to know the information regarding antireflection properties of
SiNx  thin films prepared by CVD ,PECVD,EBET etc.
   I will appreciate the same.
Thanking you

K.C.Mohite

[email protected]

reply
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