I have done this simulation using Algor (crapy software, not the former VP).
I simulated the intrinsic stress as a thermal stress by assigning different
coefficients of thermal expansion to the SiN membrane and substrate, then
changing the temperature.  I then looked at the response to an external
pressure applied to the membrane with appropriate boundry conditions.

I was told that Ansys had the ability to handle intrinsic stress, but I
haven't tried.

>>> Kyutae Yoo  11/08/01 04:20PM >>>
Hello All,

Does anyone know how to simulate a tensile stressed membrane
using ANSYS? I have done modal, static, and harmonic analysis
without any stress in the membrane using ANSYS, but since I am
going to fabricate the membrane out of LPCVD SiN, I am expecting
to have some intrinsic tensile stress (100~200 MPa) in reality.
So, how do I include this tensile stress effect for the analysis?
By the way, we use ANSYS 5.7
Thank you for your help

Q
____________________________________________________________________
Kyu-Tae Yoo
Ph.D. candidate

Cornell University                       Phone:530-752-2522(office)
#117 Phillips Hall                            :530-902-5153(cell)
Computer and Electrical Engineering           :530-297-5153(Home)
Ithaca, NY  14853-5401                   eFax :509-463-1127
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