I am interested in collecting and collating information on releasing surface
MEMS structures. In particular, I am interested in release of poly and nitride
structures atop oxide.
If you know of published references on this topic, or have unpublished
technical reports or anecdotal information, I would be happy to compile and
post to the newsgroup.
Thanks,
Al Henning
Assoc. Prof.
Thayer School of Engineering
Dartmouth College
Hanover, NH 03755-8000
603/646-3671
603/646-3856 (FAX)
[email protected]
http://caligari.dartmouth.edu/~henning/henning.html
