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MEMSnet Home: MEMS-Talk: How to reduce Undercuts for quartz etching?
How to reduce Undercuts for quartz etching?
2001-11-10
trammi
2001-11-12
Roger Shile
How to reduce Undercuts for quartz etching?
trammi
2001-11-10
Dear all,


         I'm Ramakrishna working quartz micro machining project. I observed
Undercuts, after etching in BHF at 80C temp, which are quite large(around
300-350 um). Does anyone knows how to reduce these undercuts. i'm using fused
quartz substrate.


Thanks in advance.


T.Ramakrishna,


IITMadras, Chennai. (INDIA)






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