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MEMSnet Home: MEMS-Talk: Re: PZT film
Re: PZT film
2001-11-11
Emilio P. Calius
Re: PZT film
Emilio P. Calius
2001-11-11
"xinyu li"  wrote:
>
> Does anybody know the relationship between PZT film thickness and
> applying voltage and frequency


In a conventionally poled PZT, the voltage required for a certain induced strain
is directly proportional to the thickness (distance between electrodes) if the
material properties are constant. And the through-thickness (33) extension and
shear mode resonant frequencies are both inversely proportional to thickness.

But it seems that the piezoelectric coefficients decrease significantly with
film thickness. See for example: L. Lian and N.R. Sottos, "Effects of thickness
on the piezoelectric and dielectric properties of lead zirconate titanate thin
films", Journal of Applied Physics, vol. 87, #8, pp. 3941-3949 (April 2000).
They attribute it to residual stresses.

Good luck, and let us know your results.


-----------------------------------------------------------------------
Dr Emilio P. Calius
Research Engineer: Smart Materials and Structures
Industrial Research Limited
PO Box 2225, Auckland, New Zealand
Ph: +64 9 303 4116,     Fax: +64 9 307 0618

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