Hi,

I think you can apply pre-stress.
Set the thermal coefficient on the material, and chang the ambinet
temperature.

________________________
il-seok Son (Sunny)
UW-Madison, ECE
[email protected]
________________________



>From: Kyutae Yoo 
>To: 
>Subject: [mems-talk] stressed membrane simulation using ANSYS
>Date: Thu, 8 Nov 2001 19:20:42 -0500 (EST)
>
>Hello All,
>
>Does anyone know how to simulate a tensile stressed membrane
>using ANSYS? I have done modal, static, and harmonic analysis
>without any stress in the membrane using ANSYS, but since I am
>going to fabricate the membrane out of LPCVD SiN, I am expecting
>to have some intrinsic tensile stress (100~200 MPa) in reality.
>So, how do I include this tensile stress effect for the analysis?
>By the way, we use ANSYS 5.7
>Thank you for your help
>
>Q
>____________________________________________________________________
>Kyu-Tae Yoo
>Ph.D. candidate
>
>Cornell University                       Phone:530-752-2522(office)
>#117 Phillips Hall                            :530-902-5153(cell)
>Computer and Electrical Engineering           :530-297-5153(Home)
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