Was the undercut more than the etch depth?  If so, the problem is probably due
to poor adhesion of the etch mask.

Though I havn't tried etching patterns in quartz, I have been etching Pyrex in
BOE.  I could not get adequite adhesion of photoresist to the Pyrex,  so I
first put down 1200 angstroms of chrome.  After developing and hardbaking the
resist, I etch the chrome, then etch the Pyrex in BOE.

>>> "trammi"  11/10/01 02:04PM >>>
Dear all,


         I'm Ramakrishna working quartz micro machining project. I observed
Undercuts, after etching in BHF at 80C temp, which are quite large(around
300-350 um). Does anyone knows how to reduce these undercuts. i'm using fused
quartz substrate.


Thanks in advance.


T.Ramakrishna,


IITMadras, Chennai. (INDIA)






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