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MEMSnet Home: MEMS-Talk: Etch oxide not Aluminum?
Etch oxide not Aluminum?
2001-11-12
Yahong Yao
2001-11-12
[email protected]
2001-11-13
Roger Shile
Etch oxide not Aluminum?
Yahong Yao
2001-11-12
Hello Folks,

Is there any etchant which etches oxide fast but does not attack Al?
Thanks a lot.

Yahong

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