] Dear MEMS,
] I am currently having problems electroplating small nickel
] features (typically a few microns) through thick photoresist. I am unable
] to get the electroplating solution (Nickel sulphate based) into all the
] resist openings due to the high aspect ratios and small
] dimensions. I would be grateful if anyone could suggest a suitable
] wetting agent to overcome this problem.
]
] Cheers,
] Mike Young.
Mike,
Perhaps a pinch of the surfactant "Sodium Lauryl Sulfate" will do the trick.
You will often find it listed on the back of shampoo bottles.
If you add too much the bath will form a foamy head like a beer.
-Jack
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Jack W. Judy Office: 510-642-1010
497 Cory Hall (BSAC) FAX: 510-643-6637
Berkeley, CA 94720-1770 email: [email protected]
http://www-bsac.eecs.berkeley.edu/~jjudy/
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