I was asked to post a summary of the responses I received on the question
about depositing teflon. Many thanks to all those who sent me email with
their experiences.
Scott
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The question was:
Hi,
A colleague of mine has asked me about possible methods for
depositing teflon on silicon. If you have any experience or references I
would appreciate hearing it. Thanks in advance.
Scott
[email protected]
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You might want to investigate using C4F8 in an rie system. We have been able
to produce some nice teflon-like polymers at certain conditions. The
adheasion is great and it conforms to whatever features are present.
Bob Henderson
480-558-1156
[email protected]
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You can: -sputter teflon
-use a spincoating solution that you can bake-out at 80
degrees -during DRIE and RIE processes teflon can be
formed.
Kind regards,
Heiko van der Linden
MESA+ Research Institute
Twente University
Drienerlolaan 5
P.O.box 217 7500AE
Enschede, the Netherlands
Heiko van der Linden [[email protected]]
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we successfully deposited teflon on silica and silicon by plasma enhanced
CVD in a parallel plate reactor (13.56 MHz) using TFE (Tetraflourethylene)
as a gaseous precursor. As expected very poor wettability and therefore not
a perfect adhesion to the substrate (lifts off in acetone after 15 mins in
an ultrasonic bath).
Stefan.
Stefan Wiechmann [[email protected]]
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You can deposit a "Teflon-like polymer" from a fluorocarbon plasma. My
understanding is that when the C to F ratio in the plasma exceeds ~3 a
transition occurs from etching to polymer deposition.
My personal experience is that a pure CHF3 plasma will result in the etch
chamber quickly being coated with a soft material that I could sink my
fingernail in.
Roger Shile [[email protected]]
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I believe the STS DRIE etch tool can also deposit teflon...the biomems
group in berkeley (Prof. Luke Lee, Dorain Liepmann) use this all the time.
Sunil.
Sunil Bhave [[email protected]]
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==== Comments by [email protected] ("Jim Intrater -- IE") at
11/08/01 2:52 pm
It is not well known but DuPont makes a Teflon-based solution. It is called
Teflon AF and is PTFE dissolved in a flourinated solvent. You might be able
to spin-coat the solution onto a wafer and then dry/bake it on.
-Jim Intrater
Integer Engineering Corp.
http://www.integer-eng.com
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What thicknesses are you looking for?
If you require films in microns, Dupont sells amorphous fluoropolymers-
Teflon AF products.
You will have to use a flurosilane as an adhesion promoter.
Please do email me back if you want more information or
you may visit http://www.dupont.com/teflon/af/index.html
Thanks,
Pancham Patel.
[email protected]
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Hi Scott,
Dupont supplies spin on teflon.
with the proper adehsion promoter it even sticks.
Shay Kaplan
shay kaplan [[email protected]]
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