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MEMSnet Home: MEMS-Talk: 15 um wet oxidation time?
Need Information about Actuator Simulation
2001-11-13
Siripon Sukuabol
2001-11-13
Vandemeer Jan-r44430
2001-11-13
Tom Rust
2001-11-14
julien charton
15 um wet oxidation time?
2001-11-14
Jon Doe
2001-11-14
Vandemeer Jan-r44430
15 um wet oxidation time?
Jon Doe
2001-11-14
Hi:
We would like to grow 15 um of wet thermal oxide and
can go to 1100C. Does anybody have a tabel or aa idea,
how long you have to grow the oxide at this
temperature?

Thanks

Thomas

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