Hello,

I have to put Al contacts on a Si mesa structure which is of 1.3 um in
height. I would like to do planarisation on the substrate (Si) with respect
to the mesa structure such that i could reduce the height. Can any one
suggest me how to do the planarization and the right polymer to be used for
this.

                     _________
              ____Al______    |
             |            |   |
             |            |1.3| um
             |            |___|______
    _________|            |____Al_____
                      Substrate
  ____________________________________


Thanking you all in advance,

Ajey Jacob.



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