Hi, there,
  I want to etch a 1um deep and 6um diameter in silver. Can SiCl4 and BCl3
or other kind of gas do this work? I tried to wet etch it with NH4OH and
H2O2 before. It can etch away large Ag surface but can not deal with this
"drilling hole" job. Any clue about this problem?
  Thanks a lot in advance.
  Qingwei

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