Dear MEMS experts,

I 'm looking for information about pyrex deep etching.
Actually, we would like to realize some cicular micro-covers starting
from a pyrex wafer.
These covers have a diameter of around 2 mm.
Could you give me any information about a suitable technique for this
kind of operation?

Thanks a lot.


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Dr. Paolo Bondavalli
R&D Engineer
LABCOM - Laboratoire Interconnexions Optiques et MEMS
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
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