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Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 18-121, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Our cause is a secret within a secret, a secret that only another secret
can explain; it is a secret about a secret that is veiled by a secret."
- Ja 'far as-Sadiq, 6th Imam

On Tue, 20 Nov 2001 [email protected] wrote:

> Could anyone give me advice on where I can secure suitable material to attach
> one very thin wafer to a thicker wafer  to provide structural strength for
> the thin wafer. I also need a product that will allow good heat transfer from
> one wafer to the other during an rie process to protect photoresist from heat
> in the plasma. I heard of a material called Cool Grease but have no idea who
> makes it. After processing I need to be able to separate the wafers with a
> minimum of physical stress on the thin wafer. A chemical soak would be best.
> Has anyone ever used wax to accomplish this? I appreciate your help. Thanks
> in advance.
> Bob Henderson
> Process Integration,LLC
> [email protected]
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