Positive: AZ1400, 4562
Negative: SU-82002 or SU-82

The thickness can be controlled by spin speed. For AZ1400, several hundred
rpm can meet your requirement. Some PR also has dilute solution to make it
thinner.

Hongjun


--__--__--

Message: 2
Date: Fri, 16 Nov 2001 17:26:19 -0800 (PST)
From: Carl Arft 
To: [email protected]
Subject: [mems-talk] Looking for 3-4 micron thick photoresist

Hello

I'm looking for a g-line photoresist that spins on 3-4 microns
thick.  Anyone heard of such a thing?

thanks,

carl