Mike,

Would you mind sharing your findings on RIE services available. Sources and
cost specifically.

Thanks,
Kevin Walsh
see header below
>
>
> Dear MEMS members,
>
> Does anyone know where I could go to get Reactive Ion Etching (RIE)
> work done (to remove silicon and silicon oxide) on a few wafers?
> I understand Berkely may provide this service.
>
>
> Mike Hershey
> Integrated Sensing Systems (ISSYS), Inc.
> tel: 313-998-8671
> fax: 313-998-6789
>
>
>
--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]