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MEMSnet Home: MEMS-Talk: microstructures from Si etching
microstructures from Si etching
2001-11-27
brian adams
microstructures from Si etching
brian adams
2001-11-27
I was wondering if anyone out there has produce microstructures (i.e.
posts, lines, etc.) by etching of Si (wet or dry), and if so what
kind size and aspect ratio did you get and how was it done. Just getting
started on a project and was wondering what was possible. Thanks.

Brian Adams
[email protected]

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