Dear all:
I am now doing an experiment which need to etch the silicon without attacking
Al. The alkaline etchants that we usually adopted in MEMS, TMAH and KOH, could
not satisfy the requirement. I heard that some organic material can do this job,
can anyone here provide me the information? Or advise me other effective
solutions? Anything you provided will be highly appreciated!
Thanks
Daniel
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Daniel Xu (Xu zhengyi)
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Ph.D candidate
State Key Laboratories of Transducer Technology
Shanghai Institute of Microsystem & Information Technology
Chinese Academy of Sciences
865 Changning Road
Shanghai 200050
China
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Tel: 86-21-62511070 ext. 8607
FAX: 86-21-62513510
email:[email protected]
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