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MEMSnet Home: MEMS-Talk: corrugated membrane, large deflection
corrugated membrane, large deflection
2001-11-30
[email protected]
corrugated membrane, large deflection
[email protected]
2001-11-30
Dear all,
  I am investigating the performance of corrugated membranes with a central
boss. There are some papers concerning their deflections under pressures, such
as the papers of P.R.Scheeper et al and Y.Zhang and K.D.Wise (J. of
Microelectromechanical systems,1994). Some of the models give different
formulas to calculate the behaviour of membranes, and some of them are only
valid for specific geometries and sizes.
  The diaphragms I am studying would have relatively large dimensions (1cm*1cm
or even greater) and a large deflection(ca 100 micron). Which model is best for
this kind of diaphragms? Also, is there any paper dealing with the natural
vibration frequencies of these corrugated membranes? Thanks a lot in advance.

  Wanling

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