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MEMSnet Home: MEMS-Talk: curl of structural layer after release
curl of structural layer after release
2001-12-05
Biao Li
curl of structural layer after release
Biao Li
2001-12-05
Hi,

There are several papers about the effect of sacrificial layer etching on
the profile of structural layer due to stress. Anyone can tell me the source
of the literature? Thanks.

Biao Li
Albany NanoTech

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