Hi Sheri,

I think you are looking for Foturan. This is sold by mikroglas in
Germany.
Check www.mikroglas.de . The Foturan is difficult to process and you
need
a very high power UV lamp  for this (not a normal aligner).
We have not so good experience though with mikroglas and maybe it's
better
to find another company that sells the glass.

Also if you need deep etching and can live with some roughness in the
etched
cavities you could consider powder blasting.

Greets,
Heiko van der Linden


*******************************
MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
*******************************


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Xiaoyan (Sheri) Wang
Sent: Thursday, December 06, 2001 7:31 PM
To: [email protected]
Subject: [mems-talk] photosensitive glass


Hi, All,

I'm looking for a type of glass that is photo-etchable or
negative photosensitive. Does anyone know where I can get
it? Any information is greatly appreciated.

Regards,

Sheri
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