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MEMSnet Home: MEMS-Talk: photosensitive glass
photosensitive glass
2001-12-06
Xiaoyan (Sheri) Wang
2001-12-06
Charles Ellis
2001-12-07
kuo-Sheng ma
2001-12-06
Alex Shenderov
2001-12-07
Danny Klein
2001-12-07
Holger Becker
2001-12-07
Heiko van der Linden
2001-12-07
SoojeCho
2001-12-07
Mark Leonard
2001-12-10
Liz Shelley
2001-12-07
Legge, Coulton H
2001-12-07
Klauder, Jr., Philip R.
2001-12-07
Meg Abraham
photosensitive glass
Meg Abraham
2001-12-07
Hi Sheri,

There are photo reactive glasses sold by both mikroglas and Corning.  They
form a
positive of your exposure though (exposed glass crystallizes and is more
attachable
after anneal) We have found that it is very possible to process the glass
using a photo
aligner if it has high quality optics or by using just the bulb.  The glass
absorbs well
around 320 nm (probably a cerium absorption).  A typical mercury vapor lamp
does
have a line at around 315nm but it is not strong.  Also BK7 glass
(typically used to
make optics for near UV and visible) does not transmit well at all in the
315 nm
range. Therefore, you can use a lamp to expose Foturan if you give it a
long
exposure (on the order of hours) and if you don't have any BK7 glass optics
in the
system (I just stripped all the BK7 stuff out of an old aligner).  If you
have access to
a laser you can use other UV lines, but this appears to be a multi photon
process and
so you need a high fluence which the laser provides (see Fuqua et al in MRS
proc
vol 624 pp79 to 85)

Good luck
Meg
[email protected]

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