Hi MEMS-people,

I have to dry-etch epoxy materials (just isotropically). Does anyone
have experiences with that? Which gases can I use (CF4/O2, SF6/O2 ?)?

furthermore, I have to deposit thin films on epoxy layers. I'm afraid
of the adhesion. Which material should be the first layer (basically,
I can use any adhesion layer which is deposited, sputtered or
evaporated: metals, SiO2, SiN, ...)? Could you recommend any adhesion
promoter? Probably the same as are used for polymers?

Thanks for your help, have a nice day,

Joachim.
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Joachim Oberhammer, Dipl.-Ing.

Royal Institute of Technology (KTH)   Phone:    +46/(0)8 790 6250
Dep. of Signals, Sensors and Systems  Fax:      +46/(0)8 10 0858
Microsystem Technology (MST)          Mobile:   +46/(0)70 692 1858
                                       e-mail:   [email protected]
Osquldas vdg 10                       homepage: http://www.s3.kth.se/mst/
SE-100 44 Stockholm, Sweden