Hello group,
I4m beginning a phD research about porous silicon. The first step of my
study is to develop a reactor to get macroporous silicon by anodical
etching in a reliable way. A preliminary bibliographic seek about this
item revealed that the more commonly used etchant is the hydrofluoric acid
(HF). I think all you know how dangerous is to work with HF, a highly
corrosive compound. My inquiry to the group is if someone know other
etchant that enables a more safety and a less hazardous process to get
porous silicon. (I found something about ammonium fluoride...).
I4m looking for people that have interest in form a research group about
this subject. Someone have interest?
Thank you
Luiz Marangoni
MEMS Enginneering Phd. Student
State University of Campinas - UNICAMP - Brazil