Luiz,
I have done some work with porous silicon in HNO3....



-----Original Message-----
From: Luiz Marangoni [mailto:[email protected]]
Sent: Sunday, December 09, 2001 5:10 PM
To: MEMS Talk List
Subject: [mems-talk] More safety Porous Silicon process


Hello group,

I4m beginning a phD research about porous silicon. The first step of my
study is  to develop a reactor to get macroporous silicon by anodical
etching in a reliable way. A preliminary bibliographic seek about this
item  revealed that the more commonly used etchant is the hydrofluoric acid
(HF). I think all you know how dangerous is to work with HF, a highly
corrosive compound. My inquiry to the group is if someone know other
etchant that enables a more safety and a less hazardous process to get
porous silicon. (I found something about ammonium fluoride...).
I4m looking for people that have interest in form a research group about
this subject. Someone have interest?

Thank you


Luiz Marangoni
MEMS Enginneering Phd. Student
State University of Campinas - UNICAMP - Brazil
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