> Date: Sun, 9 Dec 2001 02:47:32 -0800 (PST)
> From: vishnu goutham 
> Reply-To: [email protected]
> To: [email protected]
> Subject: [mems-talk] analytical solution for rectangular diaphragm
>     deflection
>
> hi!
>
>     i'm looking for analytical solution of rectangular
> and elliptical diaphragm deflections.
>
>     if anyone has any info on this....please let me
> know....

No general analytical solutions for deflection of loaded rectangular diaphragms
exist, as it requires solving a set of differential equations (the Von Karman
equations, describing bending and stretching) which don't lend themselves very
well for straight boundaries. You can find some closed formulas and/or
expressions for maximal deflection based on numerical results in literature
(check e.g. Roark's Formulas for Stress & Strain or Timoshenko's Theory of
Plates and Shells)...

cheers,
Dirk De Bruyker

Xerox Palo Alto Research Center (PARC)
3333 Coyote Hill Road, Palo Alto, California 94340, USA

Tel: (650) 812 4129
Fax: (650) 812 4140
E-mail: [email protected]