Hi
You probably need a thin layer of Cr ( even stainless steel) between Pd and
Glass.

Vladimir
Nayna Networks

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Rajsekhar Popuri
Sent: Friday, December 07, 2001 7:09 AM
To: [email protected]
Subject: [mems-talk] lift-off


Hello,

I am trying to do a lift-off.I sputter coated gold-palladium of 2000A
thickness on a glass wafer.When i tried to do a lift-off with
acetone-methanol,gold-palladium layer was completely peeled off the glass
wafer.Can anyone tell me the reason for this and suggest a suitable process
to do a lift-off with gold-palladium.

Thanks in advance
Rajsekhar.




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