Frank,
There are hundreds of companies that can make you an adequate wet station.
Who you select should be based on how sophisticated a station you need. In
general there are 3 types of Wet stations as follows:
The simplest type is entirely manually operated. An operator loads the
cassettes into the various baths and eventually transfers them to a dryer.
If this is what you are looking for, try to find a company that uses good
components and will support your installation and startup.
The next step up is a semi-automated station. These are typically 2 or 3
tanks and have an automated arm that will transfer cassettes from a load
position to a process tank and then into a rinse. After the rinse, they have
to be manually transferred to a dryer. These stations offer better control
over the etch time and usually offer some data logging capability.
At the high end is fully automated, where cassettes are automatically
transferred through all process and rinse steps, then dried and brought to
an output station. These can be very sophisticated and typcially used by
high volume semiconductor houses. Most suppliers in this arena offer process
development support, on site service support, and many other services.
Regardless of the tpye of station you use, I would like to mention that my
company, Imtec Acculine, makes a heated bath that is ideal for KOH etches.
We use PFA Teflon coated Stainless Steel and we can add a stir motor or
motors depending on how big the bath is. We can also do built in condensing
collars with lids to help maintain chemical concentration in long processes.
The baths are good up to 130C and we have a special module that monitors
skin temperature and prevents blistering of the Teflon coating. We also
offer temp controllers that are good to +/- 0.2 degrees.
You can contact me direct if you would like additional information. email:
[email protected]
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of ^Frank ^
Sent: Monday, December 10, 2001 1:35 PM
To: [email protected]
Subject: [mems-talk] KOH wet etching station
Dear all,
I am wondering whether there is a kind of wet etching station that can
precisely control the bath temperature, the stirrer speed and rinse clean
the wafer?
Thanks,
frank
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