Hello Jeff,

First of all, thank you for your answer. Could you give me more details
about the process?

Thank you very much

luiz marangoni
[email protected]



>Luiz,
>I have done some work with porous silicon in HNO3....
>
>
>
>-----Original Message-----
>From: Luiz Marangoni [mailto:[email protected]]
>Sent: Sunday, December 09, 2001 5:10 PM
>To: MEMS Talk List
>Subject: [mems-talk] More safety Porous Silicon process
>
>
>Hello group,
>
>I4m beginning a phD research about porous silicon. The first step of my
>study is  to develop a reactor to get macroporous silicon by anodical
>etching in a reliable way. A preliminary bibliographic seek about this
>item  revealed that the more commonly used etchant is the hydrofluoric acid
>(HF). I think all you know how dangerous is to work with HF, a highly
>corrosive compound. My inquiry to the group is if someone know other
>etchant that enables a more safety and a less hazardous process to get
>porous silicon. (I found something about ammonium fluoride...).
>I4m looking for people that have interest in form a research group about
>this subject. Someone have interest?
>
>Thank you
>
>
>Luiz Marangoni
>MEMS Enginneering Phd. Student
>State University of Campinas - UNICAMP - Brazil
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