Dear Colleagues,

I am looking to buy an interferometer which can help me in doing modal analysis
of mems devices. I am hoping to be able to measure mechanical motion with
frequencies up to 50 kHz. The width of the vibrating mems device could be as
small as 10 microns. I am talking to UBM, but, would like to explore other
options. If you are familiar with any other company that makes such a
measurement tool, please share your knowledge with me.

I appreciate very much your time and help.

Thanks,

Vijay Dhuler