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MEMSnet Home: MEMS-Talk: bonding silicone rubber or PMMA with Si or poly-Si
bonding silicone rubber or PMMA with Si or poly-Si
2001-12-11
Ebin Liao
bonding silicone rubber or PMMA with Si or poly-Si
2001-12-12
Heiko van der Linden
bonding silicone rubber or PMMA with Si or poly-Si
2001-12-12
Jeff Zahn
bonding silicone rubber or PMMA with Si or poly-Si
Ebin Liao
2001-12-11
Dear All:

I have made a micromachined sensor chip, and now I'd
like to bond it (Si or Poly-Si) to some polymeric
slices (silicone rubber or PMMA). Someone told me it
was very difficult to bond silicone rubber with other
materials. Anyone has experience for bonding silicone
rubber or PMMA to Si or poly-Si? I'd like to try Super
Glue by hand at first. Anyone has other suggestions?
Thanks a lot.

Best regards,

Ebin
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