Hi Ebin,

I know that PDMS ( a silicone rubber, SYLGARD 194) can be bonded with
good results to silicon, silicon oxide, glassy carbon, etc.you have to
oxidize the top layer of the PDMS in an O2 plasma. The surface will then
contain oxide groups that will condense with for instance silicon oxide
thus resulting in a very strong bond. Try to find the article by
Whitesides and Duffy about microstructuring in PDMS. There you can read
all the details.

Good luck,

Heiko van der Linden

*******************************
MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
*******************************


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Ebin Liao
Sent: Wednesday, December 12, 2001 5:50 AM
To: [email protected]
Subject: [mems-talk] bonding silicone rubber or PMMA with Si or poly-Si


Dear All:

I have made a micromachined sensor chip, and now I'd
like to bond it (Si or Poly-Si) to some polymeric
slices (silicone rubber or PMMA). Someone told me it
was very difficult to bond silicone rubber with other materials. Anyone
has experience for bonding silicone rubber or PMMA to Si or poly-Si? I'd
like to try Super Glue by hand at first. Anyone has other suggestions?
Thanks a lot.

Best regards,

Ebin
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