I have bonded PMMA sheets obtained from goodfellow to
silicon wafers using microchem 495K PMMA resist.  The
chlorobenzene interdiffuses from the resist into the
bulk polymer to make a seamless seal.   It is not
hard.

Good luck,

Jeff


--- Ebin Liao  wrote:
> Dear All:
>
> I have made a micromachined sensor chip, and now I'd
> like to bond it (Si or Poly-Si) to some polymeric
> slices (silicone rubber or PMMA). Someone told me it
> was very difficult to bond silicone rubber with
> other
> materials. Anyone has experience for bonding
> silicone
> rubber or PMMA to Si or poly-Si? I'd like to try
> Super
> Glue by hand at first. Anyone has other suggestions?
> Thanks a lot.
>
> Best regards,
>
> Ebin
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