RTVs (room-temperature-vulcanizing silicones) are commonly used
for silicon chips that are sensitive to packaging stress, such as pressure
sensors.
GE makes a line of these for various other applications,
but they are well-suited for silicon, silicon dioxide, and gold as well.

-----Original Message-----
From: Ebin Liao [mailto:[email protected]]
Sent: Tuesday, December 11, 2001 8:50 PM
To: [email protected]
Subject: [mems-talk] bonding silicone rubber or PMMA with Si or poly-Si


Dear All:

I have made a micromachined sensor chip, and now I'd
like to bond it (Si or Poly-Si) to some polymeric
slices (silicone rubber or PMMA). Someone told me it
was very difficult to bond silicone rubber with other
materials. Anyone has experience for bonding silicone
rubber or PMMA to Si or poly-Si? I'd like to try Super
Glue by hand at first. Anyone has other suggestions?
Thanks a lot.

Best regards,

Ebin
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