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MEMSnet Home: MEMS-Talk: Need for thin film mechanical properties data
Need for thin film mechanical properties data
1996-06-24
Steve Bolin
Need for thin film mechanical properties data
Steve Bolin
1996-06-24
We are trying to perform mechanical modelling of MEMS devices for theorectical
reliability study. We are currently using bulk mechanical properties of the
materials used in these devices. (Primarily gold, platinum, nickel, silicon and
silicon nitride) Does anyone know of published work giving the mechanical
properties of thin films of these materials?

Thanks,

[email protected]


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