A really good process to bond a piece, or sheet, of PMMA to a material (Si,
ceramic, metal), is to coat and bake the material with the 495k PMMA resist.
Then place the piece of PMMA sheet lightly on top, and wet the interface
with methyl methacrylate (MMA).  Capillary force (surface tension) will
force the MMA to wet the interface.  Upon drying, the materials will be
bonded extremely well.  MMA is a very good solvent for this procedure since
it should not displace the already well bonded 495k PMMA from the substrate,
nor should it craze the PMMA sheet, but still will cause enough molecular
interdiffusion for bonding.  The MMA should sufficiently diffuse nicely form
the material stack at room temperature.

Ken

-----Original Message-----
From: Jeff Zahn [mailto:[email protected]]
Sent: Wednesday, December 12, 2001 10:06 AM
To: [email protected]
Subject: Re: [mems-talk] bonding silicone rubber or PMMA with Si or
poly-Si


I have bonded PMMA sheets obtained from goodfellow to
silicon wafers using microchem 495K PMMA resist.  The
chlorobenzene interdiffuses from the resist into the
bulk polymer to make a seamless seal.   It is not
hard.

Good luck,

Jeff


--- Ebin Liao  wrote:
> Dear All:
>
> I have made a micromachined sensor chip, and now I'd
> like to bond it (Si or Poly-Si) to some polymeric
> slices (silicone rubber or PMMA). Someone told me it
> was very difficult to bond silicone rubber with
> other
> materials. Anyone has experience for bonding
> silicone
> rubber or PMMA to Si or poly-Si? I'd like to try
> Super
> Glue by hand at first. Anyone has other suggestions?
> Thanks a lot.
>
> Best regards,
>
> Ebin
> Check out Yahoo! Shopping and Yahoo! Auctions for
> all of
> your unique holiday gifts! Buy at
> http://shopping.yahoo.com
> or bid at http://auctions.yahoo.com
> _______________________________________________
> [email protected] mailing list: to unsubscribe
> or change your list
> options, visit
>
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> Visit us at http://www.mems-exchange.org/
Check out Yahoo! Shopping and Yahoo! Auctions for all of
your unique holiday gifts! Buy at http://shopping.yahoo.com
or bid at http://auctions.yahoo.com
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/