Hi Jim
I am wondering, If" reverse polarity" type resists are also resistant to KOH
after processing.
> From: Jim Intrater -- IE 
> Reply-To: [email protected]
> Date: Thu, 13 Dec 2001 16:44:38 -0800
> To: [email protected]
> Subject: RE: [mems-talk] How to protect Aluminium thin film from KOH solution
>
> I am assume that the Aluminum is patterned during the etch of
> silicon.Photoresist is resistive to KOH if it is not exposed to light.
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