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MEMSnet Home: MEMS-Talk: Al Deposition
Al Deposition
2001-12-16
Lior Grossman
2001-12-17
Bruno Wacogne
2001-12-17
John Somerville
2001-12-19
Luiz Marangoni
Al Deposition
Lior Grossman
2001-12-16
Hi All,
I am trying to deposit 20 microns of Aluminum in Evaporation or in
Sputtering.
However, the film is very stress (more stress in sputtering).
Do you know a way to reduce the stress for such films?


My Best Regards,
Lior Grossman; Sales Manager
B.G. Technical Support Ltd (www.bg-tech.co.il)

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