Looking to set initial state of a phase change media, but need
to "heat" it percisely to control the state. Dont want to ablate it.
The material is very responsive to very short pulses.
Any ideas? Love to do it photolith method.
At 11:59 AM 12/15/2001, Erol Harvey wrote:
>Hi,
>
>We use an excimer laser for our ablation work - this uses mask projection so
>produces results in a "photolithographic-like" way. Typically the resolution
>of the systems is around 1 micron - so that the smallest features you can
>produce are of the order of a few microns in size. Holes and lines are
>special cases and you may be able to get these down a bit smaller in size.
>
>Aspect ratio, with all the usual problems in defining exactly what you mean
>by aspect ratio, is comfortably between 1 and 5, but with care and the right
>choice of materials we are achieving around 10 to 13.
>
>The choice of material depends a lot on what you want to do, how thick you
>want the structure to be, any thermal properties etc. However if you want to
>machine onto a silicon wafer, SU-8 photoresist baked at any temperature, or
>laminated dry film resists are pretty good. The advantage of the laser
>ablation process on SU-8 is that it can be used to remove the unwanted SU-8
>after plating without any difficulty.
>
>Erol Harvey
>Swinburne University of Technology, Australia
> http://www.swin.edu.au/iris/mt/index.htm
>CRC for Microtechnology, Australia
> http://www.microtechnologycrc.com
>
>Lior Grossman wrote:
>
> > Hi,
> > I heard about the use of Laser Ablation for Microengineering.
> > I would like to structure a material with Laser ablation method (after it
> > was spinned on a Si wafer)
> > and than to fill it with metal (by PVD, Electroplating, etc.).
> > Do you know what is the material that I should use structuring?
> > Do you know the resolution of the features that I can achieve with Laser
> > Ablation?
> >
> > My Best Regards,
> > Lior Grossman
> > B.G. Technical Support Ltd
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