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MEMSnet Home: MEMS-Talk: effect of ammonium flouride
effect of ammonium flouride
2001-12-18
Ken Kwon
2001-12-19
Luiz Marangoni
2001-12-20
Ravi Shankar
effect of ammonium flouride
Ken Kwon
2001-12-18
Hello,

     I am looking for a literature or an article about effect of using
ammonium flouride in oxide wet etching (BOE) and in isotropic silicon wet
etching.  I know that it is acting as a buffer but I want to know about its
mechanism and any experiment results showing why ammonium flouride is
prefered in some cases.

Thank you.

Ken.


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