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MEMSnet Home: MEMS-Talk: Etchant for Lithium Niobate
Good photoresist choices for aqua regia (or another rhodium etchant)
2001-12-14
Jordan M. Berg
Etchant for Lithium Niobate
2001-12-19
Ashish Singh
2001-12-20
Jason Hayes
Etchant for Lithium Niobate
Ashish Singh
2001-12-19
Hi all,

I am trying to etch Lithium Niobate. I tried to etch it with buffered
HF but there is not result.

Kindly let me know if there are other etchants or techniques to etch
Lithium Niobate.

Thanks
Ashish Singh
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