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MEMSnet Home: MEMS-Talk: LTO in a Novellus reactor?
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LTO in a Novellus reactor?
2001-12-19
Jon Doe
2001-12-19
Vic Kley
2001-12-19
Jim Intrater -- IE
LTO in a Novellus reactor?
Jon Doe
2001-12-19
Hi all:
I have only a Novellus Concept one reactor and would
like to try to do doped LTO in it. We have SiH4, O2,
N2,Ar, N2O, Phosphine. Has anybody ever tried that and
if so, what were the conditions for- and the
properties of the low temperatur oxide?
Thanks very much in advance.

Thomas

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