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MEMSnet Home: MEMS-Talk: ACES (Anisotropic Crystalline Etch Simulation) on W2K
ACES (Anisotropic Crystalline Etch Simulation) on W2K
2001-12-19
Raj Gupta
ACES (Anisotropic Crystalline Etch Simulation) on W2K
2001-12-19
Mark West
ACES (Anisotropic Crystalline Etch Simulation) on W2K
Mark West
2001-12-19
I am running Win2k on a P3-850 and the NT version of Aces worked fine. I
haven't worked much with it so I can't attest to its accuracy.

You may want to download again and re-install.

Good Luck

Mark
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Raj Gupta
Sent: Wednesday, December 19, 2001 2:13 AM
To: [email protected]
Subject: [mems-talk] ACES (Anisotropic Crystalline Etch Simulation) on
W2K


Dear all-

I download ACES from C. Liu's MEMS website at the University of Illinois
in Urbana (http://mass.micro.uiuc.edu/), and found it freezes my Windows
2000 laptop a few seconds after completing its analysis.  The program
was designed to run on Windows 95/NT.  I have changed the shortcut
settings to run ACES in both Windows NT and Windows 95 compatibility
modes in W2K to no avail.

So I have two general questions:

(1) Has anyone been successful running this program in W2K,
        and if so, how?  If the source code is available, can
        it be recompiled for W2K?

(2) How true are the simulations?  One will note that the only
        crystal silicon planes with finite etch rates as defined
        in the simulator are the <100> and the <311>.

Thanks,
Raj
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