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MEMSnet Home: MEMS-Talk: Hard mask for 20 um deep SiO2 RIE etch?
Hard mask for 20 um deep SiO2 RIE etch?
2001-12-19
[email protected]
2001-12-20
Liz Shelley
2001-12-20
Jon Doe
2001-12-20
[email protected]
2001-12-20
[email protected]
2001-12-20
BERAUER,FRANK (HP-Singapore,ex7)
Hard mask for 20 um deep SiO2 RIE etch?
[email protected]
2001-12-20
I have found that SU-8 photoresist at 50-100 microns holds up well to rie
etch of extended times. How deep are you wanting to etch? The problem with
SU-8 is getting it off after etch. It will ash off but it takes a while.  Bob

Gold might be an acceptable mask for you as well but remember that gold will
rie sputter an coat your chamber. If this is not a problem then it is fine.
Bob

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