Hi:
You can use LAM, AMAT, STS or Alcatel oxide etchers. I
am afraid the thick PR burns up during the long etch.
Thanks
Thomas
--- "X. Yuan"  schrieb: > Hi, have
you ever tried just thick PR?
> I am not sure about your specific
> etching conditions. Just a suggestion.
> By the way, is there any special equipment
> that can do such a thick SiO2 etch?
>
> Thanks a lot.
>
> Yuan
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